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Reaction products and oxide thickness formed by Ti out-diffusion and oxidization in poly-Pt/Ti/SiO2/Si with oxide films depositedCHANGHONG CHEN; DEXIU HUANG; WEIGUANG ZHU et al.Applied surface science. 2006, Vol 252, Num 20, pp 7590-7593, issn 0169-4332, 4 p.Article
